Response to comment on: Size effects on yield strength and strain hardening for ultra-thin Cu films with and without passivation: A study by synchrotron and bulge test techniques

In their comment (M. Lagos et al., Scripta Mater. (2012), http://dx.doi.org/10.1016/j.scriptamat.2012.04.018), Lagos et al. propose a two-dimensional plasticity model based on grain boundary sliding to explain the deformation behavior of ultrathin Cu and Ta/Cu film systems on polyimide substrates. Here, we critically discuss their comments and include new results obtained by peak profile analysis of the original in situ diffraction data; they strongly suggest that the deformation behavior of the different film systems is very likely not self-similar as claimed by Lagos et al.